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型號Model

D512MG

規格Specification

H

M

L

氣體Gas

可配置

滿量程Full scale

100SCCM - 10SLM

50SCCM - 5SLM

110 - 350 kPa(A), Configurable

工作入口壓力Operating inlet pressure

350 - 750 kPa(A), Configurable

240 - 450 kPa(A), Configurable

110 - 350 kPa(A), Configurable

工作壓差Operating differential pressure

≥ 350 kPa(D)

≥ 240 kPa(D)

≥ 110 kPa(D)

下游工作壓力Operating downstream pressure

≤ 13.3 kPa(A)

≤ 53.3 kPa(A)

≤ 13.3 kPa(A)

≤ 53.3 kPa(A)

≤ 13.3 kPa(A)

≤ 53.3 kPa(A)

控制范圍Control range

數字控制：0.2 - * F.S. 模擬控制：2 - * F.S.

數字控制：0.5 - * F.S.模擬控制：2 - * F.S.

數字控制：0.5 - * F.S.模擬控制：2 - * F.S.

數字控制：1 - * F.S.

模擬控制： 2 - * F.S.

2 - * F.S.

5 - * F.S.

25°C時的流量精度Flow rate accuracy at 25°C

±1% S.P. (5 - * F.S.)

±0.05% F.S. (0.2 - 5% F.S.)

+ ±0.2%F.S. for analog control

±1% S.P. (10 - * F.S.)

±0.1% F.S. (0.5 - 10% F.S.)

+ ±0.2%F.S. for analog control

±1% S.P. (10 - * F.S.)

±0.1% F.S. (0.5 - 10% F.S.)

+ ±0.2%F.S. for analog control

±1% S.P. (20 - * F.S.)

±0.2% F.S. (1 - 20% F.S.)

+ ±0.2%F.S. for analog control

±1% S.P. (50 - * F.S.)

±0.5% F.S. (2 - 50% F.S.)

+ ±0.2%F.S. for analog control

±1% F.S. (5 - * F.S.)

+ ±0.2%F.S. for analog control

25°C以上的溫度誤差Temperature error from 25°C

±0.05% S.P. / °C (5 - * F.S.)

±0.0025% F.S. / °C (0.2 - 5% F.S.)

+ ±0.01%F.S. / °C for analog control

±0.05% S.P. / °C (10 - * F.S.)

±0.005% F.S. / °C (0.5 - 10% F.S.)

+ ±0.01%F.S. / °C for analog control

±0.05% S.P. / °C (10 - * F.S.)

±0.005% F.S. / °C (0.5 - 10% F.S.)

+ ±0.01%F.S. / °C for analog control

±0.05% S.P. / °C (20 - * F.S.)

±0.01% F.S. / °C (1 - 20% F.S.)

+ ±0.01%F.S. / °C for analog control

±0.05% S.P. / °C (50 - * F.S.)

±0.025% F.S. / °C (2 - 50% F.S.)

+ ±0.01%F.S. / °C for analog control

±0.05% F.S. / °C (5 - * F.S.)

+ ±0.01%F.S. / °C for analog control

偏移/跨度穩定性Offset / Span stability

±0.5% F.S. / year

±1% F.S. / year

±5% F.S. / year

重復性Repeatability

±0.3% S.P. (5 - * F.S.)

±0.015% F.S. (0.2 - 5% F.S.)

±0.3% S.P. (10 - * F.S.)

±0.03% F.S. (0.5 - 10% F.S.)

±0.3% S.P. (10 - * F.S.)

±0.03% F.S. (0.5 - 10% F.S.)

±0.3% S.P. (20 - * F.S.)

±0.06% F.S. (1 - 20% F.S.)

±0.3% S.P. (50 ~ * F.S.)

±0.15% F.S. (2 ~ 50% F.S.)

±0.3% F.S. (5 ~ * F.S.)

閥門類型

常閉/壓電執行器Normally Close / Piezo Actuator

加速時間* 1Settling time for step up *1

≤ 0.8 sec

≤ 0.8 sec

≤ 1 sec

閥片泄漏Valve sheet leak

< 0.2 %F.S.

< 0.5 %F.S.

< 2 %F.S.

耐壓Proof pressure

1000 kPa(A)

泄漏完整性Leak integrity

≤ 5×10-12 Pa·m3/s (He)

濕物料Wetted material

SUS-316L，鎳合金

標準配件* 2Standard fitting *2

相當于1/4英寸VCR，1.125英寸IGS

工作溫度Operating temperature

15 - 45 °C

貯存溫度Storage temperature

0 - 80 °C

安裝方向Installation orientation

Attitude Insensitive

進口壓力精度Inlet pressure accuracy

±10 kPa ( 0 - 1000 kPa(A) ) for digital signal

±17 kPa ( 0 - 700 kPa(A) ) for analog signal

溫度精度Temperature accuracy

±1 °C ( 15 - 45 °C )

熱身操作Warming up operation

≥ 30 minutes

控制接口Control interface

模擬：D微型9針，數字：RS-485 F-Net協議

電源Power supply

+15 V±5％，*200 mA，-15 V±5％，*150 mA